(Log on 21st)
As reported in the Elog, the BS TMP was failed on 18th. The pump was restarted, but it has problems.
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Started the RP in the back side of TMP.
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Opened the angle valve of RP.
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Reset the TMP and started it.
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The pressure in BS chamber was 1.8x10-6 Torr.
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After the rotation speed of TMP reached 600 Hz, opened the gate valve for BS chamber.
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The pressure was increased to 2.0x10-6 Torr. This means that the outgassing rate of TMP itself is too large.
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Closed the gate valve and the angle valve.
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Stoped the TMP and the RP.
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Checked the RP. The inline filter between the TMP and the RP was filled by oile. The vapor of oile might contaminate the TMP.
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Replaced the RP system (RP itself, inline filter, bellows, angle valve) to the other from the EW arm.
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To declease the outgassing rate of TMP, a baking is necessary. Binded the TMP with the ribbon heater and attached the thermometer.
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Restarted the TMP and the RP closing the gate valve.
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The temparature must be lower than 120 oC. The heater was turned on/off manually around 110oC for 30 min.
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According to the manual of TMP, 4 hours are necessary for the baking. Will continue the baking on 23rd.