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EleonoraCapocasa - 19:58, Sunday 20 October 2019 (1756)Get code to link to this report
Sudden failure of BS turbo pump
[Yuhang, Yao-chin, Eleonora ]
 
Last friday 18/10 at about 16.30, we had a sudden issue with turbo pump of BS.  While we were working in the clean room, it started to make a strong noise and to decrease its rotation frequency down to zero. On the screen it appeared the message “ERROR 089”.  We checked on the manual (link below)  and found that it corresponds to “ Rotor vibration” error.
 
 
We couldn't contact Takahashi-san. We closed the gate valve of turbo pump and rotary pump and switch rotary pump off.  We didn't close any main gate valve.  Today the vacuum level was still the same of Friday (2.8e-6 Torr)