According to Matteo's suggestion, the beam waist and size of the green and infrared may have some different, so it is better to measure the green beam come out from the cavity.
So today we remove the two dichroic, the lens and Faraday, finally we had enough space to put the beam profiler and do some measurement, but even like this, we only can took three points,after the third point, we still had space but the beam size is too large to measure. The beam profiler has two axis,v and w, the first time we took three data points, two of them is fine, the beam size in two axis is similar, but one point had a large difference. So after the calculation, the beam waist and position in these two axis is very difference(one has half size of the other). Then we did the second measurement, this time the result is good, and we got the beam waist size was 36 micrometer instead of 52 micrometer(the beam waist size of the infrared), and the beam position is 15.5cm away from the input port of cavity instead of 7.5cm(infrared).
Although we got this result, we still have the suspect that maybe the astigmatism is from the cavity, since the beam size is too large, the measurement may have some error.
Then because we already remove the dichroic, we tried to turn it to make the two beams from two surface of the mirror can be separated. But we turned the mirror little by little almost 360 degree, the two beam still become into one. So we thought maybe the wedge is too small, even it separate the two beam, but the beam size increase too quickly, then the main beam will cover the other.
Before the holiday, we found out the picomotor which controls the yaw of BS mirror cannot be controlled by the computer. And we checked the cable, from the driver to the connected part of the picomotor and the cable, it works well. Also we exchanged the port between pitch and yaw, after pitch works well, so the problem is also not from the driver. So Marc checked again the picomotor, he thought the problem is inside the picomotor,and we planned to change the it after we finished the green path and need to align the beam.