I turned on the scroll pump today for chamber evacuation. I did not notice any issue with the scroll pump operation.
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Turned on Scroll Pump at 8:03
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Opened right angle valve between TMP and scroll pump at 8:08
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Opened gate valve between chamber and TMP at 8:15 (fully open at 8:18)
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Turned on Vacuum guage at 8:23 (The pressure was 3.75*103 Pa)
I turned on the TMP at 12:54. The pressure at that time was 3.58*101 Pa.
The pressure at 13:05 was 8.1*10-2 Pa.
I will continue pumping for a while (until Monday).
Note: The TMP is in "local" mode and can only be operated using the front control panel.
The pressure at 8:00 was 4.7*10-4 Pa. Looking at previous logs, the final pressure is consistent with past values.
I plan to start cooling on Thursday.
I also checked the valves for water supply to compressor are open. So I might not have to worry about cleaning up the water lines. I heard the water is supplied by ATC, but do I need to turn on the water chiller?