Two HEPA capsules are installed for the air gun of PCI cleanroom. The maximum air pressure was specified to be 3.4 bar (figure 1). So I adjusted the pressure of the compressed air as attached figure2.

History: Marc found that there is air leakage between the connection part of capsule and tube. The connection was done by only fixing capsule and tube with steel belt. Aso-san put some white sealing tapes in this connection part. The use of sealing tape solves the problem of air leakage.