KAGRA AOS (General)
SimonZeidler - 18:47, Monday 02 November 2015 (197)
SiC Surface Measurements

I did again measurements on the surfaces of some new SiC samples.
The number of samples this time was 6 from two companies: 3 samples from "NihonFineCeramics" and 3 samples from "Coorstek".

The average surace height distribution (Sa) has been found with Zygos NewView instrument to be 10 ~ 12 nm, for all samples. The measured window has been chosen to be 3x3 mm (2.5x mag.). Thus, the resolution is not particular high. Therefore, and also as we found some irregularities in the measured Sa values at higher resolutions (50x mag.), we made an additional measurement with the AFM in ATC on a randomly chosen spot of the third sample from "Croostek". The determined value of Sa with the AFM is 16.2 nm.

Attached to this report are the taken pictures of the height profiles. The first three are from "Croostek", the other three from "NihonFineCeramics". In black/white, the AFM picture is shown.

Images attached to this report
197_20151102104638_siccoorstek1.bmp 197_20151102104643_siccoorstek2.bmp 197_20151102104648_siccoorstek3.bmp 197_20151102104654_sicjgw1.bmp 197_20151102104659_sicjgw2.bmp 197_20151102104704_sicjgw3.bmp 197_20151102104720_sic.jpg