[Tomaru-san, Tanioka]

Today, we investigated the problem of the vacuum gauge.
Tomaru-san cleaned the inside of it, then I installed it to the chamber.
We checked the behavior by pumping down, but the situation was not improved.
Around 1.2*10^-2 Pa, the vacuum gauge showed an error related to the sensor.

We will send it to the company and ask for repairing or buy a new one.